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基本参数
  • 品牌

    惠普HP

  • 型号

    HP 4140B

详细说明

pA表/直流电压源 HP 4140B

厂家:Agilent/HP

  • 三种基本的半导体测量:I,I-V和准静态的C-V
  • 两种可编程电压源:±100V可编程源/函数发生器,±100V可编程直流电压源
  • 基本精度:0.5%
  • 高分辨率:1fA
  • 准静态C-V:0.1~1999pF,dc电压斜率1mV/s~1V/s,增量为1mV/s

Agilent 4140B pA表/直流电压源是测量仪器的组成部分,它由一个非常稳定的微微安表和两个可编程直流电源组成,其中一个用作斜坡和阶梯波发生器的操作和直流电源。这些特点使得4140B成为直流特性测量,如漏电流,电流电压特性,准静态C-V测量的理想工具,以满足半导体工业发展新产品和提高产量的要求。在测量电子部件和材料确定漏电流或绝缘电阻时它是有用的。

4140B也可用于半导体器件的开发,生产和质量控制,改善电子元件和设备的可靠性。

HP/Agilent 4140B pA Meter/DC Voltage Source Features:

  • 3 basic semiconductor measurements: I, I-V and quasi-static C-V
  • Two programmable voltage sources
  • High resolution: 0.001 x 10-12 A
  • HP-IB standard

Component Measurement instrumentation. It consists of an extremely stable picoampere meter and two programmable dc voltage sources, one of which operates as a ramp and staircase generator as well as a dc source.

  • Stable pA Measurements
    * maximum resolution of 10-15 A
    * low noise test leads, and an electrostatic and light shielded test fixture
  • Synchronized I-V Measurements
    * precise, programmable timing capability, we can now make fast, accurate I-V and C-V measurements
  • Quasi-Static C-V Measurements
    * automatic quasi-static C-V measurements are easily accomplished by the ramp voltage capability
  • HP-IB Capability

Specifications:

  • Measurement Functions: I, I-V and C-V
  • Voltage Sources: two separate sources (VA and VB)
  • VA: ± 100V programmable source/function generator
  • VB: ± 100V programmable dc voltage source

Measurement Function/Source Selection

  • Function: I, I-V, C-V
  • Voltage sweep: auto or manual (pause)

Current Measurements

  • Displays: current, 3½ digits with 2 character annunciator. Voltage, 3½ digits
  • Measurement range: ±0.001 x 10-12 A to 1.000 x 10-2 A full scale in 11 ranges
  • Overrange capability: 99.9% on all ranges
  • Range selection: auto (lowest current range is selectable) and manual
  • Zero Offset: cancels leakage current of test leads or test fixtures
  • Offset range: 0 to ± 100 x 10-15 A
  • Trigger: INT, EXT and HOLD/MAN
  • Input terminal: triaxial

Capacitance-Voltage (C-V) Measurement

  • Measurement ranges: 0.0 pF - 100.0 pF and 200 pF - 1000 pF full scale in two ranges; 99.9% overrange
  • Ranging: auto
  • % C: capacitance change of device under test is displayed as a percent of the set value of the oxide capacitance (Cox = 100%)
  • %C range: 0.0% - 199.9%
  • Cox setting ranges (2 ranges): 0.1 pF - 199.9 pF and 200 pF - 1999 pF
  • Zero offset: cancels stray capacitance of test fixtures and test leads
  • Offset range: 0 to 100 pF
  • High speed I data output: available with HP-IB interface only. Outputs current measurement data at 4 ms intervals (max rate)

DC Voltage Sources

  • Output Modes, VA and VB
  • VA: Ramp up, Ramp up/down, Staircase up, Staircase up/down, dc
  • VB: dc
  • Voltage ranges (VA and VB): 0 to ± 10.00V and 0 to ± 100.0V in 2 ranges, auto range only
  • Maximum current: 10 mA, both sources
  • Voltage sweep: auto and manual (pause), up/down step in manual (pause) mode. Sweep abort standard

Operating Parameter Setting Ranges

  • Start voltage and stop voltage: 0 - ± 10.00V, 0.01V steps; 0 - ± 100.0V, 0.1V steps
  • Step voltage: 0 - ± 10.00V, 0.01V steps; 0 - ± 100.0V, 0.1V steps
  • Hold time: 0 - 199.9 seconds in 0.1s increments; 0 - 1999 seconds in 1.0s increments
  • Step delay time: 0 - 10.00 seconds in 0.01s increments; 0 - 100.0 seconds in 0.1 increments
  • Ramp rate (dV/dt): 0.001 V/s - 1.000 V/s in 0.001 V/s increments

Current Measurement

  • Range: 10-2 - 10-8, 10-9, 10-10, 10-11, 10-12

Analog Output I, C and VA

  • Low pass filter: 3 position: OFF, 0.22s ± 20% and 1s ± 20% applied to both VA and I/C data outputs
  • Pen lift output
  • Recorder output scaling: push button scaling of lower left and upper right limits of X-Y recorder
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